Analysis of insulating specimens with the Cameca IMS4f

• 1 July 1990
• journal article
• technique development
• Published by Wiley in Surface and Interface Analysis
• Vol. 16  (1-12) , 9-13
• https://doi.org/10.1002/sia.740160105

Abstract

Keywords

• COMPENSATION
• CHARGES
• IMS4F
• SPECIMENS
• ELECTRIC
• SECONDARY
• INSULATING
• OWING
• ELECTRON
• EXACT