The Chemical Vapor Deposition of Aluminum Nitride: Unusual Cluster Formation in the Gas Phase
- 1 June 1997
- journal article
- research article
- Published by American Chemical Society (ACS) in Journal of the American Chemical Society
- Vol. 119 (24) , 5668-5678
- https://doi.org/10.1021/ja964163s
Abstract
No abstract availableKeywords
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