Magnetron sputtered carbon nitride films
- 31 December 1994
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 68-69, 188-193
- https://doi.org/10.1016/0257-8972(94)90158-9
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Nano-indentation studies of ultrahigh strength carbon nitride thin filmsJournal of Applied Physics, 1993
- Analytical electron microscopy and Raman spectroscopy studies of carbon nitride thin filmsJournal of Vacuum Science & Technology A, 1993
- Growth and characterization of C-N thin filmsSurface and Coatings Technology, 1992
- Structure and bonding studies of the C:N thin films produced by rf sputtering methodJournal of Materials Research, 1990
- Hardness measurements of thin filmsThin Solid Films, 1984
- Reactive sputtering of carbon and carbide targets in nitrogenJournal of Vacuum Science and Technology, 1979