Influence of the substrate doping level on spreading resistance profiling

• 1 January 1996
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 14  (1) , 404-407
• https://doi.org/10.1116/1.588483

Abstract

Keywords

• SPREADING RESISTANCE
• SUBSTRATE DOPING
• DOPING LEVEL
• RESISTANCE PROFILING
• INFLUENCE