Heterodyne interferometry with a frequency-modulated laser diode
- 1 January 1988
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 27 (1) , 124-128
- https://doi.org/10.1364/ao.27.000124
Abstract
A digital phase measuring interferometer with a frequency-modulated laser diode using the integratedbucket technique is described. The injection current is continuously changed to introduce a time- varying phase difference between the two beams of an unbalanced Twyman-Green interferometer. The intensity of the interference patterns is integrated with a CCD array sensor for intervals of one-quarter period of the fringe. Using the intensity data a microcomputer calculates the phase to be detected. Some experimental results with the interferometer are presented; the rms repeatability obtained was λ/80.Keywords
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