Titanium nitrade film formation by the dynamic ion beam mixing method
- 1 January 1993
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 80-81, 1402-1405
- https://doi.org/10.1016/0168-583x(93)90808-j
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Surface modification of structural materials by dynamic ion mixing processMaterials Science and Engineering: A, 1989
- Titanium Nitride Crystal Growth with Preferred Orientation by Dynamic Mixing MethodJapanese Journal of Applied Physics, 1987
- A Monte Carlo computer program for the transport of energetic ions in amorphous targetsNuclear Instruments and Methods, 1980
- Heavy-ion sputtering yield of siliconJournal of Applied Physics, 1975