Micromechanical Membrane Switches on Silicon

• 1 July 1979
• journal article
• Published by IBM in IBM Journal of Research and Development
• Vol. 23  (4) , 376-385
• https://doi.org/10.1147/rd.234.0376

Abstract

Keywords

• SILICON
• TRANSISTORS
• RELAYS
• INTEGRATED CIRCUIT
• MICROMECHANICAL MEMBRANE SWITCHES
• VOLTAGE CONTROLLED
• FABRICATION