Efficiency of a capacitor-transfer-type discharge excimer laser with automatic preionization
- 15 October 1986
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 60 (8) , 2721-2728
- https://doi.org/10.1063/1.337102
Abstract
Energy transfer aspects in a capacitor-transfer-type discharge excimer laser with automatic preionization (API) have been studied to improve the laser efficiency. Detailed measurements on the discharge and output characteristics of the XeCl laser show that efficient energy transfer from the storage capacitor to the discharge capacitor is essential for improvement in the overall efficiency. The circuit analysis based on the measurements suggests that the API discharge excimer laser could be operated with an electrical efficiency of about 4%. The overall efficiencies of 2.9, 2.8, and 1.3% have been obtained with the XeCl, KrF, and ArF lasers, respectively.This publication has 20 references indexed in Scilit:
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