Elastic stiffness and thermal expansion coefficients of various refractory silicides and silicon nitride films
- 1 August 1980
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 70 (2) , 241-247
- https://doi.org/10.1016/0040-6090(80)90364-8
Abstract
No abstract availableKeywords
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