Speculations on a mechanism for the ion beam induced degradation of polyimide
- 1 March 1989
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 39 (1) , 796-799
- https://doi.org/10.1016/0168-583x(89)90899-9
Abstract
No abstract availableKeywords
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