The estimations of the 10-11Pa range pressure measurement errors by a point collector gauge.
- 1 January 1991
- journal article
- Published by The Vacuum Society of Japan in SHINKU
- Vol. 34 (1) , 17-24
- https://doi.org/10.3131/jvsj.34.17
Abstract
No abstract availableKeywords
This publication has 0 references indexed in Scilit: