Growth of CNx/BN:C multilayer films by magnetron sputtering

• 1 February 2000
• journal article
• Published by Elsevier in Thin Solid Films
• Vol. 360  (1-2) , 17-23
• https://doi.org/10.1016/s0040-6090(99)00950-5

Abstract

Keywords

• SPUTTERING
• MULTILAYERS
• CARBON NITRIDE
• BORON NITRIDE
• TRANSMISSION ELECTRON MICROSCOPY
• NANOINDENTATION