Deformable-Mirror Spatial Light Modulators
- 22 May 1990
- proceedings article
- Published by SPIE-Intl Soc Optical Eng
- Vol. 1150, 86-103
- https://doi.org/10.1117/12.962188
Abstract
A brief overview of deformable-mirror spatial light modulator (SLM) technology is presented, followed by the first comprehensive review of the Texas Instruments deformable-mirror device (DMD), a subclass of deformable-mirror SLMs. The DMD architecture, fabrication, and operation (both analog and digital) are described. It is shown that amplitude-dominant or phase-dominant modulation is obtained by a simple modification of the pixel architecture. Representative DMD applications are presented.Keywords
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