Graphical Representation of the Piezoresistance Coefficients in Silicon-Shear Coefficients in Plane
- 1 July 1987
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 26 (7R) , 1031-1033
- https://doi.org/10.1143/jjap.26.1031
Abstract
The shear piezoresistance coefficients π'66, π'16 and π'26 of p- and n- type silicon are plotted as a function of the crystal directions for orientations in the (100) plane. Silicon pressure and other mechanical sensors with a four-terminal gauge, such as a Hall effect-type device, utilizing the shear stress have been of much interest. The outputs of the sensors are proportional to the shear piezoresistance coefficient π'66.Keywords
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