Nonlinear phenomena in hydrogen implantation into (100) silicon
- 1 March 1989
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 39 (1-4) , 26-29
- https://doi.org/10.1016/0168-583x(89)90735-0
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Silicon amorphization during ion implantation as a thermal phenomenonPhysical Review B, 1987
- Modeling heavy implants in amorphous substratesIEEE Transactions on Electron Devices, 1985
- Computer simulation of atomic-displacement cascades in solids in the binary-collision approximationPhysical Review B, 1974
- Determination of Lattice Disorder Profiles in Crystals by Nuclear BackscatteringJournal of Applied Physics, 1972