Optimization of layered synthetic microstructures for narrowband reflectivity at soft x-ray and EUV wavelengths
- 15 August 1986
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 25 (16) , 2757-2763
- https://doi.org/10.1364/ao.25.002757
Abstract
Layered synthetic microstructures (LSM) have been shown to be useful in obtaining high reflectivities in the soft x-ray and EUV portions of the spectrum, particularly at angles approaching normal incidence.Keywords
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