Evolution of VLSI reliability engineering
- 1 July 1991
- journal article
- Published by Wiley in Quality and Reliability Engineering International
- Vol. 7 (4) , 221-233
- https://doi.org/10.1002/qre.4680070406
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Effects of residual gas control in relationship with sputtered aluminum film morphology and electromigration properties in fine-line very large scale integrated structuresJournal of Vacuum Science & Technology A, 1988