Dissociation energetics of SiF systems of relevance to etching reactions

This publication has 27 references indexed in Scilit:

• Detection of the Silyl Radical SiH3by Infrared Diode-Laser Spectroscopy
  Physical Review Letters, 1986
• Relation between singlet-triplet gaps and bond energies
  The Journal of Physical Chemistry, 1986
• Plasma-assisted etching mechanisms: The implications of reaction probability and halogen coverage
  Journal of Vacuum Science & Technology B, 1985
• Synchrotron photoemission investigation of the initial stages of fluorine attack on Si surfaces: Relative abundance of fluorosilyl species
  Physical Review B, 1984
• The chromium methylidene cation: CrCH2+
  The Journal of Physical Chemistry, 1984
• Ab initiocluster study of the interaction of fluorine and chlorine with the Si(111) surface
  Physical Review B, 1983
• The shape and Hamiltonian consistent (SHC) effective potentials
  The Journal of Physical Chemistry, 1981
• An SCF–CI study of the structures, inversion barriers, and inversion frequencies of SiH3, PH3+, and SH3++
  The Journal of Chemical Physics, 1981
• The Description of Chemical Bonding From AB Initio Calculations
  Annual Review of Physical Chemistry, 1978
• Orbital optimization in electronic wave functions; equations for quadratic and cubic convergence of general multiconfiguration wave functions
  Physical Review A, 1976