Ion and neutral argon temperatures in electron cyclotron resonance plasmas by Doppler broadened emission spectroscopy
- 1 May 1995
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 13 (3) , 935-942
- https://doi.org/10.1116/1.579654
Abstract
No abstract availableThis publication has 0 references indexed in Scilit: