Fast growing protrusions from epitaxial semiconductor surfaces
- 1 March 1970
- journal article
- Published by Springer Nature in Metallurgical Transactions
- Vol. 1 (3) , 647-650
- https://doi.org/10.1007/bf02811591
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Influence of epitaxial mounds on the yield of integrated circuitsProceedings of the IEEE, 1969
- Structural defects in epitaxial films — Role of surfaces in nucleationMaterials Science and Engineering, 1966
- Room Temperature Chemical Polishing of Ge and GaAsJournal of the Electrochemical Society, 1964