The constraints on the design and use of silicon-diaphragm pressure sensors
- 1 January 1983
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics & Power
- Vol. 29 (2) , 170-174
- https://doi.org/10.1049/ep.1983.0077
Abstract
As with all devices, the silicon-diaphragm pressure sensor has limitations to both its design and field of application. This article highlights the types of compromise the designer of such devices is forced to makeKeywords
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