Summary Abstract: Monte Carlo calculation for ion-assisted thin film deposition

• 1 May 1986
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 4  (3) , 461-462
• https://doi.org/10.1116/1.573906

Abstract

Keywords

• MONTE CARLO
• THIN FILM
• SUMMARY ABSTRACT
• ION ASSISTED
• ASSISTED THIN
• CARLO CALCULATION
• FILM DEPOSITION