Low energy light ion sputtering of metals and carbides
- 1 January 1980
- journal article
- research article
- Published by Taylor & Francis in Radiation Effects
- Vol. 48 (1-4) , 213-219
- https://doi.org/10.1080/00337578008209256
Abstract
For a great number of ion-target combinations similarities in low energy sputtering have been found. 11Near the threshold energy for sputtering E th, the energy dependence of the sputtering yield can be written as S = Y (E/E th)1/4 (1 – E h/E)7/2, E th and Y depend only on the surface binding energy E B and the ion-target atom mass ratio. Using this relation the energy dependence of the sputtering yield of B4C, SiC, TiC, TaC, WC is compared with the yields from S, Si, Ti, Ta, W, for H, D and He in the energy range of 50 eV to 8 keV. A strong similarity of the energy dependence, i.e. Eth , and Y, can be found between the carbide and the heavier component of the compound. This leads to the assumption, that the target surface is depleted of the light component due to preferential sputtering and the sputtering process is dominated by the heavy component.Keywords
This publication has 15 references indexed in Scilit:
- The sputtering mechanism for low-energy light ionsApplied Physics A, 1979
- Sputtering yields of graphite and carbides and their potential use as first wall materialsJournal of Nuclear Materials, 1978
- Light-ion sputtering yields for molybdenum and gold at low energiesJournal of Applied Physics, 1977
- Raman scattering and SEM studies of graphite and silicon carbide surfaces bombarded with energetic protons, deuterons and helium ionsJournal of Nuclear Materials, 1976
- Sputtering yields of 1 to 20 kev light ions on stainless steelJournal of Nuclear Materials, 1976
- Measurements of the erosion of stainless steel, carbon, and SiC by hydrogen bombardment in the energy range of 0.5 – 7.5 keVJournal of Nuclear Materials, 1976
- THE TEMPERATURE DEPENDENCE OF TRAPPING OF LOW ENERGY HYDROGEN IN GETTER MATERIALSPublished by Elsevier ,1976
- EROSION OF DIFFERENT FIRST WALL AND LIMITER MATERIALS BY LOW ENERGY HYDROGEN IONSPublished by Elsevier ,1976
- Erratum: Energy density and time constant of heavy-ion-induced elastic-collision spikes in solidsApplied Physics Letters, 1975
- Energy density and time constant of heavy-ion-induced elastic-collision spikes in solidsApplied Physics Letters, 1974