Determination of electron energy distribution functions in surface wave produced plasmas. I. Modelling
- 14 September 1991
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 24 (9) , 1571-1584
- https://doi.org/10.1088/0022-3727/24/9/009
Abstract
For surface wave produced argon plasmas in the 60-180 MHz range, electron energy distribution functions are calculated from the electron Boltzmann equation solved in the Lorentz approximation. Breakdown and maintenance field strengths are determined self-consistently by satisfying additional balance equations. The influence of space charge fields and the limits of the approximations used are discussed.Keywords
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