Ultra-high vacuum measurements of the internal stress of PVD titanium films as a function of thickness and its dependence on substrate temperature
- 1 May 1992
- Vol. 43 (5-7) , 463-465
- https://doi.org/10.1016/0042-207x(92)90057-4
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
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- Measurements of the intrinsic stress in thin metal filmsVacuum, 1990
- Internal stress of thin silver, copper, gold and chromium films—a comparisonVacuum, 1983
- Intrinsic Stress in Evaporated Metal FilmsJournal of the Electrochemical Society, 1968