Determination of optical constants of real thin films
- 11 March 1978
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 11 (4) , 583-593
- https://doi.org/10.1088/0022-3727/11/4/021
Abstract
A method is presented for determining the optical constants of films with a slightly rough upper surface and somewhat inhomogeneous over their thickness from normal incidence reflection and transmission measurements. It is shown how the film thickness and RMS height of surface irregularities can be calculated on the basis of measured absolute transmittances in the region of interference fringes.Keywords
This publication has 6 references indexed in Scilit:
- A Method for Calculating the Index of Refraction of Thin FilmsCanadian Journal of Physics, 1975
- Theoretical determination of the optical constants of weakly absorbing thin filmsJournal of Physics D: Applied Physics, 1974
- The effects of sample imperfections on optical spectraPhysica Status Solidi (b), 1972
- Hill-climbing techniques as a method of calculating the optical constants and thickness of a thin metallic filmJournal of Physics D: Applied Physics, 1969
- Méthode de calcul des constantes optiques des couches minces absorbantes à partir de mesures de réflexion et de transmissionSurface Science, 1966
- Computational Method for Determining n and k for a Thin Film from the Measured Reflectance, Transmittance, and Film ThicknessApplied Optics, 1966