Quantitative determination of the intensities of known components in spectra obtained from surface analytical techniques
- 1 April 1984
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 2 (2) , 1141-1145
- https://doi.org/10.1116/1.572690
Abstract
Linear least‐squares methods have been used to quantitatively decompose experimental data obtained from surface analytical techniques into its separate components. The mathematical procedure for accomplishing this is described and examples are given of the use of this method with data obtained from Auger electron spectroscopy [both N(E) and derivative], x‐ray photoelectron spectroscopy, and low energy ion scattering spectroscopy. The requirements on the quality of the data are discussed.Keywords
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