Influence of chlorine content on the hardness of TiN coatings formed by plasma-assisted chemical vapor deposition.
- 1 January 1989
- journal article
- Published by The Surface Finishing Society of Japan in Journal of The Surface Finishing Society of Japan
- Vol. 40 (4) , 539-542
- https://doi.org/10.4139/sfj.40.539
Abstract
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