Improved Electrical Performance of a-Si:H Thin Film Transistors, TFTs with n+ (μc-Si Contact, and Silicon Oxide and Nitride Dual-Layer Dielectrics
- 1 January 1993
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
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- Barrier-limited transport in μc-Si and μc-Si,C thin films prepared by remote plasma-enhanced chemical-vapor depositionJournal of Vacuum Science & Technology A, 1992
- Chemistry and Solid State Physics of Microcrystalline SiliconMRS Proceedings, 1989
- Effect of grain boundaries on the Raman spectra, optical absorption, and elastic light scattering in nanometer-sized crystalline siliconPhysical Review B, 1987