Production of ultra-high-purity polycrystalline silicon

• 1 May 1986
• journal article
• Published by Elsevier in Journal of Crystal Growth
• Vol. 75  (1) , 88-90
• https://doi.org/10.1016/0022-0248(86)90228-9

Abstract

Keywords

• PURITY POLYCRYSTALLINE
• HIGH PURITY
• SILICON
• ULTRA
• INHERENT
• TRICHLOROSILANE
• CARBIDE'S
• NEWLY