Ion Implanted Strip Optical Waveguides in GaAs/GaAl as MQW Material
- 1 January 1988
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
This paper is the first report of the use of Si+ implantation into GaAs/GaAlAs MQW material to form optical waveguides operating at a wavelength of 1.15μm. Lateral confinement is achieved by mixing of the MQW material which is produced by the implantation of Si+ and subsequent annealing at 750°C. The properties of these waveguides are compared with those of chemically etched rib waveguides and are shown to have reasonably low losses.Keywords
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