Soft magnetic properties of multilayer FeY/SiN films
- 1 May 1990
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 67 (9) , 5719-5721
- https://doi.org/10.1063/1.345941
Abstract
Magnetic properties of sputtered multilayer Fe100−xYx/Si3N4 films (x=0–3.5 at. %) were studied. We developed heat resistant and corrosion resistant soft magnetic films having high saturation induction (Bs). The Fe97.7Y2.3/Si3N4 film has a Bs value of 17.3 kG, a coercive force (Hc) of 0.9 Oe, permeability at 5 MHz (μ) of 2800 and magnetostriction (λs) of ∼−1×10−6 after being annealed at 600 °C.This publication has 8 references indexed in Scilit:
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