Atomic-force-regulated near-field scanning optical microscope
- 1 May 1992
- proceedings article
- Published by SPIE-Intl Soc Optical Eng
- p. 44-53
- https://doi.org/10.1117/12.58192
Abstract
The design and theory of operation of a new form of near field scanning optical microscope are presented. In this system, the tip/sample distance regulation is achieved in a feedback system utilizing the topography information derived from the attractive force sensed between the tip and the sample. The technique affords the possibility of correlative microscopy. Results are presented on imaging blood smears and thin film integrated circuits.Keywords
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