Test And Measuring Methods To Analyse Undulation Effects On Micromachined Optical Surfaces Generated By Vibration On Precision Machinery

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Abstract
Transmitting and illuminating optical surfaces are machined by different processes. Grinding and polishing technologies are mainly used for glass or other non metallic materials to get the right surface figure and optical function. Milling processes like "fly-cutting"using a single point crystal diamond tool are major processes to machine metal optics. The static, kinematic and dynamic behaviour of inserted machining tool is responsible for the design quality of the optical products. Testing and analyzing methods to describe the dynaknic compliance behaviour of machine tool are well known for common milling, turning and grinding machines. This paper describes an improved testing method to analyze undulation problems on micro-machined surfaces for precision machines. The process influencing machine behaviour is recognized by the frequency depending com-pliance characteristic. A non contact laser vibration measurement is used to registrate vibrating machine tool parts. Measuring methods like modal analysis are applied to give a good impression of machine tool deformation behaviour. Results of different tests are presented. An illustration for plottable test statements will be given for a precision milling machine. Selected parts of the machine structure were rebuilt and improved the dynamic behaviour of the tested machine. Increasing undulation marks and a good surface figure are recorded on process tests.

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