X-ray lithography by synchrotron radiation of the SOR-RING storage ring
- 1 November 1979
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science and Technology
- Vol. 16 (6) , 1939-1941
- https://doi.org/10.1116/1.570359
Abstract
The results of x-ray lithography using the synchrotron radiation of the storage ring, SOR-ring, at an electron energy of 0.3 GEV are studied. AIPKeywords
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