Piezoelectric measurements with atomic force microscopy
- 28 December 1998
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 73 (26) , 3851-3853
- https://doi.org/10.1063/1.122914
Abstract
An atomic force microscope (AFM) is used to measure the magnitude of the effective longitudinal piezoelectric constant (d33) of thin films. Measurements are performed with a conducting diamond AFM tip in contact with a top electrode. The interaction between the tip and electric field present is a potentially large source of error that is eliminated through the use of this configuration and the conducting diamond tips. Measurements yielded reasonable piezoelectric constants of X-cut single-crystal quartz, thin film ZnO, and nonpiezoelectric SiO2 thin films.Keywords
This publication has 11 references indexed in Scilit:
- Direct observation of region by region suppression of the switchable polarization (fatigue) in Pb(Zr,Ti)O3 thin film capacitors with Pt electrodesApplied Physics Letters, 1998
- Characterization of ferroelectric lead zirconate titanate films by scanning force microscopyJournal of Applied Physics, 1997
- Chemical vapor deposition diamond for tips in nanoprobe experimentsJournal of Vacuum Science & Technology A, 1996
- Interferometric measurements of electric field-induced displacements in piezoelectric thin filmsReview of Scientific Instruments, 1996
- Formation and observation of 50 nm polarized domains in PbZr1−xTixO3 thin film using scanning probe microscopeApplied Physics Letters, 1996
- Scanning force microscopy for the study of domain structure in ferroelectric thin filmsJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1996
- Study of the microscopic ferroelectric properties of copolymer P(VDF-TrFe) filmsPhysica B: Condensed Matter, 1995
- Modification and detection of domains on ferroelectric PZT films by scanning force microscopySurface Science, 1994
- Local poling of ferroelectric polymers by scanning force microscopyApplied Physics Letters, 1992
- The local piezoelectric activity of thin polymer films observed by scanning tunneling microscopyJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1991