Reduction of Interface States and Fabrication of p-Channel Inversion-Type InP-MISFET

• 1 October 1980
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 19  (10) , L599-L602
• https://doi.org/10.1143/jjap.19.l599

Abstract

Keywords

• INTERFACE STATES
• INVERSION TYPE
• CHANNEL INVERSION
• STATES AND FABRICATION
• TYPE INP MISFET