Electron energy loss microanalysis system with high collection efficiency
- 1 June 1980
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 51 (6) , 705-709
- https://doi.org/10.1063/1.1136299
Abstract
An electron energy loss spectrometry system is described in which the lenses of an electron microscope are used with a straight edge magnetic sector energy analyzer to significantly improve the performance over that of the magnetic sector alone. An order of magnitude improvement in performance is demonstrated experimentally with two orders of magnitude improvement in performance predicted to be possible. The design, construction, and interfacing of the magnetic sector analyzer to the electron microscope are described.Keywords
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