High-quality Y1Ba2Cu3O6.5+x films on large area by chemical vapor deposition

Abstract
The β‐diketonate process for chemical vapor deposition Y1Ba2Cu3O6.5+x is extended to deposition on enlarged areas up to 20 cm2. The films are prepared on monocrystalline SrTiO3 and reveal a surface topography comparable to films by laser ablation. The inductively measured transition temperature Tc is up to 93 K and the transition width is smaller than 1 K; Tc is well reproduced from run to run. The critical current density jc at 77 K attains values as high as 6×106 A/cm2 in zero magnetic field; the current carrying capacity in magnetic fields up to 8 T is presented.