Thermal Etching of a (100) Silicon Surface
- 1 December 1982
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 21 (12R) , 1782
- https://doi.org/10.1143/jjap.21.1782
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Influence of Nitrogen Heat-Treatment on Silicon SurfacesJapanese Journal of Applied Physics, 1978
- Vapor Pressure of Pure Substances. Organic and Inorganic CompoundsIndustrial & Engineering Chemistry, 1947