Reduction of heat loss of silicon membranes by the use of trenchetching techniques
- 15 April 1994
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 42 (1) , 578-581
- https://doi.org/10.1016/0924-4247(94)80057-x
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- A new microstructured silicon substrate for ultrathin gas-sensitive filmsSensors and Actuators A: Physical, 1993