Two Dimensional Amorphous Silicon Image Sensor Arrays
- 1 January 1995
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
Large two dimensional amorphous silicon image sensor arrays offer a new approach to electronic document input and x-ray imaging. The sensor array technology is now capable of image capture at greater than 10 frames/sec and with resolution of 200–400 spi. We describe our new high resolution imaging system, comprising a page-sized sensor array with nearly 3 million pixels, and the accompanying high speed read out and processing electronics. The key technological issues of pixel resolution, sensor fill factor, leakage currents and noise are reviewed. Measurements of a new array architecture are described, in which the sensor is formed as a single continuous film on top of the matrix addressing components.Keywords
This publication has 19 references indexed in Scilit:
- Grain growth in laser dehydrogenated and crystallized polycrystalline silicon for thin film transistorsJournal of Applied Physics, 1994
- Evaluation of the MTF for a-Si:H imaging arraysPublished by SPIE-Intl Soc Optical Eng ,1994
- Fluoroscopic x-ray imaging with amorphous silicon thin-film arraysPublished by SPIE-Intl Soc Optical Eng ,1994
- Thin-film, flat-panel, composite imagers for projection and tomographic imagingIEEE Transactions on Medical Imaging, 1994
- 640 x 400 pixels a-Si:H TFT-driven 2D image sensorPublished by SPIE-Intl Soc Optical Eng ,1993
- Page-sized amorphous silicon image sensor arraysPublished by SPIE-Intl Soc Optical Eng ,1993
- Demonstration of megavoltage and diagnostic x‐ray imaging with hydrogenated amorphous silicon arraysMedical Physics, 1992
- Signal, noise, and readout considerations in the development of amorphous silicon photodiode arrays for radiotherapy and diagnostic x-ray imagingPublished by SPIE-Intl Soc Optical Eng ,1991
- Amorphous silicon based radiation detectorsJournal of Non-Crystalline Solids, 1991
- Amorphous Silicon Sensor Arrays for Radiation ImagingMRS Proceedings, 1990