Thermal Oxidation of (100) Silicon in O 2 and CO 2 and Its Effect on the SiO2 ‐ Si Metal Oxide Semiconductor Parameters
- 1 March 1997
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 144 (3) , 1137-1143
- https://doi.org/10.1149/1.1837546
Abstract
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