The role of rate of deposition and substrate temperature on the structure and loss of zinc sulphide and magnesium fluoride films

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Abstract
By the use of an integrating sphere, the scattering losses in films of magnesium fluoride and zinc sulphide have been measured as functions of deposition rate and of substrate temperature. It is established that an optimum deposition rate exists and that scattering losses increase with increasing substrate temperature. Electron micrographs of the films reveal structural features which generally correlate with scattering observations. Over a wide range of deposition rates, the scattering results agree with those using other methods. There is a suggestion that for zinc sulphide part of the losses at very high deposition rates arise through absorption rather than through scattering.