Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices
Top Cited Papers
- 1 November 2001
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 10 (11) , 1952-1961
- https://doi.org/10.1016/s0925-9635(01)00385-5
Abstract
No abstract availableThis publication has 37 references indexed in Scilit:
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