Soft X-ray Platinum-Carbon Multilayer Mirrors
- 1 January 1986
- proceedings article
- Published by SPIE-Intl Soc Optical Eng
- Vol. 0733, 361-368
- https://doi.org/10.1117/12.964932
Abstract
5 cm diameter, plane multilayer mirrors of different 2d value, have been fabricated from polycrystalline platinum and amorphous carbon. The performance of these multilayers as a function of layer number and thickness is presented. The importance of the commensurate nature of the stack in determining the Bragg reflectivity values (typically greater than 40% at wavelength 0.834nm) is described with reference to TEM photographs and resistivity measurements.Keywords
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