A study of Pd–Ta on Si(100) using Auger electron spectroscopy, Rutherford backscattering spectrometry, and variable energy positron annihilation
- 1 May 1989
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 7 (3) , 1601-1607
- https://doi.org/10.1116/1.576057
Abstract
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