Intrinsic stress in hydrogenated amorphous carbon prepared by rf plasma decomposition of methane
- 1 November 1991
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 70 (9) , 4903-4908
- https://doi.org/10.1063/1.349035
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
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