Sputtering of ErD2: Experiment and theory
- 1 January 1976
- journal article
- Published by Elsevier in Nuclear Instruments and Methods
- Vol. 132, 363-367
- https://doi.org/10.1016/0029-554x(76)90759-x
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
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- Contributions of backscattered ions to sputtering yields depending on primary ion energyRadiation Effects, 1973
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- Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline TargetsPhysical Review B, 1969