Concentration Dependence of the Diffusion Coefficient of Boron in Silicon

• 1 January 1980
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 19  (1) , 217-218
• https://doi.org/10.1143/jjap.19.217

Abstract

Keywords

• DIFFUSION COEFFICIENT
• CONCENTRATION DEPENDENCE
• COEFFICIENT OF BORON
• BORON IN SILICON